Zeolite-enclosed Micro-cavities on Silicon Wafer for Chemical Storage
نویسندگان
چکیده
Zeolitic self-enclosed micro-cavities were successfully fabricated. In the process, a zeolite film was grown on silicon wafer followed by pore activation and wet etching. Etchant molecules diffused through the zeolite pores and etched the silicon underneath. Nitric acid and pyridine were used for the feasibility study of chemical storages and releases using the microcavities. The release of nitric acid was observed by a continuous decrease in pH of DI water for 10minutes whereas the pyridine release was monitored by UV/vis measurement. A control experiment without cavities showed that there was no pH change or measured pyridine in the solution.
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